Fin Field Effect Transistors having Conformal Oxide Layers and Methods of Forming Same

ABSTRACT

An embodiment fin field-effect-transistor (finFET) includes a semiconductor fin comprising a channel region and a gate oxide on a sidewall and a top surface of the channel region. The gate oxide includes a thinnest portion having a first thickness and a thickest portion having a second thickness different than the first thickness. A difference between the first thickness and the second thickness is less than a maximum thickness variation, and the maximum thickness variation is in accordance with an operating voltage of the finFET.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of application Ser. No. 14/579,955,filed Dec. 22, 2014, which application is hereby incorporated herein byreference.

BACKGROUND

Semiconductor devices are used in a large number of electronic devices,such as computers, cell phones, and others. Semiconductor devicescomprise integrated circuits that are formed on semiconductor wafers bydepositing many types of thin films of material over the semiconductorwafers, and patterning the thin films of material to form the integratedcircuits. Integrated circuits typically include field-effect transistors(FETs).

Conventionally, planar FETs have been used in integrated circuits.However, with the ever increasing density and decreasing footprintrequirements of modern semiconductor processing, planar FETs maygenerally incur problems when reduced in size. Some of these problemsinclude sub-threshold swing degradation, significant drain inducedbarrier lowering (DIBL), fluctuation of device characteristics, andleakage. Fin field-effect transistors (finFETs) have been studied toovercome some of these problems.

In a typical finFET, a vertical fin structure is formed over asubstrate. This vertical fin structure is used to form source/drainregions in the lateral direction and a channel region in the fin. A gateis formed over the channel region of the fin in the vertical directionforming a finFET. Subsequently, an inter-layer dielectric (ILD) and aplurality of interconnect layers may be formed over the finFET.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is an example of a Fin Field-Effect Transistor (finFET) in athree-dimensional view.

FIGS. 2 through 18C illustrate cross-sectional views of intermediarystages of the manufacturing a finFET in accordance with someembodiments.

FIG. 19 illustrates a flow diagram of a method for manufacturing afinFET in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Various embodiments include conformal gate oxides over channel regionsof fin field effect transistors (finFETs) in a die and methods offorming thereof. The operating voltage of finFETs in the die may vary,and the thickness and uniformity of the gate oxides of each finFET maybe configured in accordance with the finFET's operating voltage. Forexample, lower operating voltage finFETs may have thinner and moreuniform gate oxides whereas higher operating voltage finFETs may havethicker and less uniform gate oxides. The formation of such gate oxidesmay include a surface nitridation process in combination with a suitableoxidation process, which may improve the conformity of the gate oxides.

FIG. 1 illustrates an example of a finFET 30 in a three-dimensionalview. FinFET 30 includes a fin 34 on a substrate 32. Substrate 32includes isolation regions 36, and fin 34 protrudes above and frombetween neighboring isolation regions 36. A conformal gate dielectric 38is disposed along sidewalls and over a top surface of fin 34. A high-kdielectric liner 40 and a conductive gate electrode 42 are disposed overconformal gate dielectric 40. Portions of fin 34 covered by gatedielectric 38/high-k dielectric liner 40/gate electrode 42 may bereferred to as a channel region of finFET 30. Source/drain regions 44and 46 are disposed in opposite sides of fin 34 with respect to the gatedielectric 38, high-k dielectric liner 40, and gate electrode 42. FIG. 1further illustrates reference cross-sections that are used in laterfigures. Cross-section A-A is across a channel, gate dielectric 38,high-k dielectric liner 40, and gate electrode 42 of finFET 30.Cross-section B-B is across a source/drain region 44 or 46 of the finFET30. Cross-section C-C is perpendicular to cross-section A-A and is alonga longitudinal axis of fin 34 and in a direction of, for example, acurrent flow between the source/drain regions 44 and 46. Subsequentfigures refer to these reference cross-sections for clarity.

FIGS. 2 through 18C are cross-sectional views of various intermediarystages in the manufacturing of finFETs in accordance with variousembodiments, and FIG. 19 is a process flow of the process shown in FIGS.2 through 18C. FIGS. 2 through 6 and FIGS. 14 through 16 illustratereference cross-section A-A illustrated in FIG. 1, except for multiplefinFETs and/or finFETs having multiple fins. As discussed above, inFIGS. 7A through 13D and 17A through 18C, figures ending with an “A”designation are illustrated along a similar cross-section A-A; figuresending with a “B” designation are illustrated along a similarcross-section B-B; and figures ending with a “C” or “D” designation areillustrated along a similar cross-section C-C.

FIGS. 2 and 3 illustrate the formation of semiconductor fins extendingupwards from a substrate. Referring first to FIG. 2, a wafer 100 havinga substrate 102 is illustrated. Substrate 102 includes a high-voltageregion 202 for forming finFET devices having a relatively high operatingvoltage and a low-voltage region 204 for forming finFET devices arelatively low operating voltage. In some embodiments, high-voltageregion 202 may include finFETs having a threshold voltage of about ofabout 1.5 volts (V), about 1.8 V, or even higher. In contrast,low-voltage region 204 may include finFETs having a threshold voltage ofabout 0.9 V, about 0.75V, or even lower. In such embodiments,high-voltage region 202 may include input/output transistors, whichconvert a higher threshold, input voltage (e.g., power supply voltage)to a lower threshold voltage suitable for operating core transistors(e.g., logic, memory, or the like) in low-voltage region 204. Regions202 and 204 may or may not be contiguous and any number of devicefeatures (e.g., isolation regions, dummy features, or the like, notshown) may be formed between high-voltage region 202 and low-voltageregion 204 depending on device design. Furthermore, devices inhigh-voltage region 202 and/or low-voltage region 204 may have differentoperating voltages than those explicitly discussed above depending ondevice design.

Substrate 102 may be a semiconductor substrate, such as a bulksemiconductor, a semiconductor-on-insulator (SOI) substrate, or thelike, which may be doped (e.g., with a p-type or an n-type dopant) orundoped. Generally, an SOI substrate comprises a layer of asemiconductor material formed on an insulator layer. The insulator layermay be, for example, a buried oxide (BOX) layer, a silicon oxide layer,or the like. The insulator layer is provided on a substrate, typically asilicon or glass substrate. Other substrates, such as a multi-layered orgradient substrate may also be used. In some embodiments, thesemiconductor material of substrate 102 may include silicon (Si);germanium (Ge); a compound semiconductor including silicon carbide,gallium arsenic, gallium phosphide, indium phosphide, indium arsenide,and/or indium antimonide; an alloy semiconductor including SiGe, GaAsP,AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof.

As further illustrated by FIG. 2, hard mask 104 and photoresist 106 maybe disposed over substrate 102. Hard mask 104 may comprise one or moreoxide (e.g., silicon oxide) and/or nitride (e.g., silicon nitride)layers to prevent damage to the underlying substrate 102 duringpatterning. Hard mask 104 may be formed using any suitable depositionprocess, such as, atomic layer deposition (ALD), chemical vapordeposition (CVD), high density plasma CVD (HDP-CVD), physical vapordeposition (PVD), and the like. Photoresist 106 may comprise anysuitable photosensitive material blanket deposited using a suitableprocess, such as, spin on coating, and the like.

FIG. 3 illustrates the patterning of substrate 102 to form fins 108disposed between adjacent trenches 110. In an example embodiment,photoresist 106 may first be patterned by exposing photoresist 106 tolight using a photomask. Exposed or unexposed portions of photoresist106 may then be removed depending on whether a positive or negativeresist is used.

The pattern of photoresist 106 may then be transferred to hard mask 108(e.g., using a suitable etching process). Subsequently, trenches 110 arepatterned into underlying substrate 102 using hard mask 104 as apatterning mask during an etching process, for example. The etching ofsubstrate 102 may include acceptable etch processes, such as a reactiveion etch (RIE), neutral beam etch (NBE), the like, or a combinationthereof. The etching may be anisotropic. Subsequently, photoresist 106is removed in an ashing and/or wet strip processes, for example. Hardmask 104 may also be removed. Thus, fins 108 are formed in wafer 100.Fins 108 extend upwards from substrate 102 between adjacent trenches110. In alternative embodiments (not shown), fins 108 (or portions offins 108) may be epitaxially grown from underlying substrate 102 inaddition to or in lieu of patterning substrate 102. In such embodiments,dopants of an appropriate type (e.g., p-type and/or n-type impurities)may be in-situ doped during the epitaxy.

Referring next to FIGS. 4 and 5, shallow trench isolation (STI) regionsare formed in wafer 100. First, as illustrated by FIG. 4, a liner 112,such as a diffusion barrier layer, may be disposed along sidewalls ofbottom surfaces of trenches 110. In some embodiments, liner 112 maycomprise a semiconductor (e.g., silicon) nitride, a semiconductor (e.g.,silicon) oxide, a thermal semiconductor (e.g., silicon) oxide, asemiconductor (e.g., silicon) oxynitride, a polymer dielectric,combinations thereof, and the like. The formation of liner 112 mayinclude any suitable method, such as, atomic layer deposition (ALD),CVD, high density plasma (HDP) CVD, physical vapor deposition (PVD), andthe like.

Next, as illustrated by FIG. 5, trenches 110 may be filled with adielectric material, such as, silicon oxide, silicon nitride, siliconoxynitride, fluoride-doped silicate glass (FSG), or the like. In someembodiments, the resulting STI regions 116 may be formed using ahigh-density-plasma (HDP) CVD process, using silane (SiH₄) and oxygen(O₂) as reacting precursors. In other embodiments, STI regions 116 maybe formed using a sub-atmospheric CVD (SACVD) process or highaspect-ratio process (HARP), wherein process gases may comprisetetraethylorthosilicate (TEOS) and ozone (O₃). In yet other embodiments,STI regions 116 may be formed using a spin-on-dielectric (SOD) process,such as hydrogen silsesquioxane (HSQ) or methyl silsesquioxane (MSQ). Anannealing (or other suitable process) may be performed to cure thematerial of STI regions 116, and liner 114 may prevent (or at leastreduce) the diffusion of semiconductor material from fins 108 into thesurrounding STI regions 116 during the annealing. Other processes andmaterials may be used. A chemical mechanical polish (CMP) or etch backprocess may be used to level a top surfaces of STI regions 116, liner114, and fins 108.

In FIG. 6, STI regions 116 are recessed, so that top portions ofsemiconductor fins 108 are higher than the top surfaces of STI regions116. The recessing of STI regions 116 may include a chemical etchprocess, for example, using ammonia (NH₃) in combination withhydrofluoric acid (HF) or nitrogen trifluoride (NF₃) as reactionsolutions either with or without plasma. When HF is used as the reactionsolution, a dilution ratio of HF may be between about 1:50 to about1:100. Liner 114 may also be recessed to be substantially level withrecessed STI regions 116. After recessing, top surface and sidewalls offins 108 are be exposed. Channel regions 118 (e.g., exposed portions offins 108 along cross-section A-A, see e.g., FIG. 7A) are thus formed infins 108. In the completed finFET structure, a gate stack wraps aroundand covers sidewalls of such channel regions 118 (see e.g., FIGS. 1 and18A).

FIGS. 7A through 7C illustrate the formation of dummy gate stacks 120 ona top surface and the sidewalls of channel region 118. Gate stacks 120include a conformal dummy oxide 122 and a dummy gate 124 over dummyoxide 122. Dummy gate 124 may comprise, for example, polysilicon,although materials such as metal silicides, metal nitrides, or the like,may also be used. Each gate stack 120 may further include a hard mask126 over dummy gate 124. Hard mask 126 may include silicon nitride orsilicon oxide, for example. Each gate stack 120 may cross over aplurality of semiconductor fins 108 and/or STI regions in someembodiments. Gate stacks 120 may also have a lengthwise directionsubstantially perpendicular to the lengthwise direction of semiconductorfins 108 (see e.g., FIG. 1). The formation of gate stacks 120 mayfurther include forming dummy oxide 122 over sidewalls and a top surfaceof source/drain regions of fins 108 as illustrated by FIG. 7B. However,dummy gate 124 and hard mask 126 may be omitted from such source/drainregions of fins 108.

As also shown in FIG. 7C, gate spacers 128 are formed on the sidewallsof gate stacks 120. In some embodiments, gate spacers 128 are formed ofsilicon oxide, silicon nitride, silicon carbon nitride, or the like.Furthermore, gate spacers 128 may have a multi-layer structure, forexample, with a silicon nitride layer over a silicon oxide layer.

Referring to FIGS. 8A through 8C, an etching is performed to etchportions of semiconductor fins 108 that are not covered by hard mask 126or gate spacers 128. The etching may further remove portions of dummyoxide 122 not covered by hard mask 126, which may correspond to portionsof dummy oxide 122 over source/drain regions of fins 108 (see FIG. 8B).After etching, remaining portions of dummy oxide 122 may be used asmajor sidewall (MSW) spacers 132 for defining source/drain epitaxy areasin subsequent process steps. Alternatively, fins 108 may be recessedpast a top surface of STI regions 116, and exposed sidewalls of STIregions 116 may be used to define source/drain epitaxy regions. In suchembodiments, spacers 132 may be omitted. Trenches 130 are accordinglyformed between adjacent spacers 132. Trenches 130 are located onopposite sides of dummy gate stack 120 (see FIG. 8C). After theformation of trenches 130, a lightly doped drain (LDD) and annealingprocesses may be performed on exposed surfaces of fins 108.

Next, as shown in FIGS. 9A through 9C, epitaxy regions 134 are formed byselectively growing a semiconductor material in trenches 130. In someembodiments, epitaxy regions 134 include silicon (with no germanium),germanium (with no silicon), silicon germanium, silicon phosphorous, orthe like. Epitaxy regions 134 may also be formed of pure orsubstantially pure germanium, for example, with a germanium atomicpercentage greater than about 95%. Hard mask 126 and spacers 132 maymask areas of wafer 100 to define an area for forming epitaxy regions134 (e.g., only on exposed portions of fins 108). After trenches 130 arefilled with epitaxy regions 134, the further epitaxial growth ofsource/drain regions causes epitaxy regions 134 to expand horizontally,and facets may start to form. Furthermore, some portions of STI regions116 may be underlying and aligned to portions of epitaxy regions 134 dueto the lateral growth of source/drain regions.

After the epitaxy step, epitaxy regions 134 may be implanted with p-typeimpurities (e.g., boron or BF₂) for PMOS devices or n-type impurities(e.g., phosphorous or arsenic) for NMOS devices to form source/drainregions, which are also denoted using reference numeral 134.Alternatively, the p-type or n-type impurity may be in-situ doped whenepitaxy regions 134 are grown to form source/drain regions. Source/drainregions 134 are on the opposite sides of gate stack 120 (see FIG. 9C),and may be overlying and overlapping portions of surfaces of STI regions116 (see FIG. 14B). In yet alternative embodiments, the patterning offin 108 and subsequent epitaxy may be omitted. In such embodiments,source/drain regions 134 may simply be disposed on opposing sides ofeach gate stack 120/gate spacers 128.

FIGS. 10A through 10C illustrate wafer 100 after inter-layer dielectric136 is formed. ILD 136 may comprise flowable oxide formed using, forexample, flowable chemical vapor deposition (FCVD). A CMP (or othersuitable planarization process) may be performed to level the topsurfaces of ILD 136, gate stack 120, and gate spacers 128 with eachother. Although not shown in detail in FIGS. 10A through 10C, variousintermediary layers (e.g., buffer layers and/or etch stop layers) may bedisposed between ILD layer 136 and source/drain regions 134, gate stack120, and/or gate spacers 128.

FIGS. 11A through 11C illustrate varying views of wafer 100 afterexposing channel regions 118 of fins 108. Exposing channel regions 110may include removing gate stack 120 (including hard mask 126, dummy gate124, and dummy oxide 122) from sidewalls and top surfaces of channelregions 118. The removal of gate stack 140 may define trench 140 betweengate spacers 128 (see FIG. 11C). A hard mask 128 may be used to mask ILD136 and source/drain regions 134 during the removal of gate stack 120.Thus, gate stack 120 may be removed without patterning ILD 136 orsource/drain regions 134.

FIGS. 12A through 17C illustrate the formation of conformal gate oxides150 and 170 on channel regions 118. As will be explained in greaterdetail in subsequent paragraphs, a thickness and/or conformity (e.g.,maximum thickness variation) of gate oxides 150 and 170 may be selectedin accordance with an operating voltage of each corresponding finFETdevice. For example, it has been observed that finFETs having loweroperating voltages may benefit from thinner and more conformal gateoxide layers than higher operating voltages finFETs. Thus, in variousembodiments the thickness and/or conformity of gate oxide 150 inhigh-voltage region 202 may be different than the thickness and/orconformity of gate oxide layer 170 in low-voltage region 204 (see e.g.,FIGS. 17A and 17C).

Referring first to FIGS. 12A through 12D, a nitride layer 142 is formedon channel regions 118. The formation of nitride layer 142 may includeperforming a thermal nitridation on the exposed semiconductor materialof channel regions 118, for example. In such embodiments, nitride layer142 may comprise a semiconductor nitride (e.g., silicon nitride, and thelike). In some embodiments, the thermal nitridation process may includemaintaining wafer 100 at a temperature of about 600° C. to about 1000°C. while a nitrogen-containing precursor chemical 144 (e.g., ammonia(NH₃) or diluted N₂, see FIG. 12D) is supplied to channel region 118 inan environment maintained at about 1 Torr to about 760 Torr of pressure.The resulting nitride layer 122 may have a thickness T1 of about 6 Å toabout 15 Å and may contain an atomic percentage of nitrogen of about 2%to about 30%, for example. Other suitable nitridation processes may alsobe used. The thermal nitridation process may selectively form nitridelayer 142 on exposed semiconductor material of fins 108 without formingnitride layer 142 on other surfaces (e.g., STI regions 116 or hard mask138) of wafer 100. It has been observed that by first forming a nitridelayer on channel regions 118, greater conformity can be achieved insubsequently formed gate oxides (e.g., gate oxides 150 and 170).

In FIGS. 13A through 13D, an oxidation is performed to form a firstconformal gate oxide 150 on channel regions 118. Gate oxide 150 may beformed by performing any suitable oxidation process on the nitridatedsurface of channel regions 118. For example, after nitride layer 142 isformed, an in-situ steam generation (ISSG) process may be used to formgate oxide 150 on channel regions 118. In such embodiments, the ISSGprocess may consume nitride layer 142, and in the resulting structuregate oxide 150 may include a semiconductor oxynitride layer 150A (e.g.,comprising SiON) over a semiconductor oxide layer 150B (e.g., comprisingSiO) as illustrated by FIG. 13D. In some embodiments, the ISSG processmay include maintaining wafer 100 at a temperature of about 850° C. andabout 950° C. while steam (indicated by molecules 146 in FIG. 13D) issupplied over channel region 118. Other suitable oxidation processes mayalso be used. The oxidation process may selectively form gate oxide 150on channel regions 118 without forming gate oxide 150 on other surfaces(e.g., STI regions 116 or hard mask 138) of wafer 100.

As illustrated by FIG. 13A, the resulting gate oxide 150 may have athickness T2 on a bottom edge of channel region 118, a thickness T3 on asidewall of channel region 118, and a thickness T4 on a top surface ofchannel region 118. Thicknesses T2, T3, and T4 may not be exactly equaldue to the different crystalline orientations of the semiconductormaterial of fins 108. For example, thickness T2 at a bottom edge ofchannel regions 118 may be less than thicknesses T3 and T4 on sidewallsand a top surface of channel regions 118. It has been observed that boththe thickness and conformity of gate oxide 150 may affect thereliability of finFETs. For example, given a desired operating voltagefor a finFET, a desired reliability (e.g., less than 2% failure rate) ofthe finFET may be provided by selecting a suitable thickness andconformity for gate oxide 150. In subsequent paragraphs, the conformityof gate oxide 150 may be defined as a maximum thickness variation (e.g.,a difference) between a thinnest portion and a thickest of a gate oxide.Thus, in various embodiments, the dimensions and conformity ofthicknesses T2, T3, and T4 may be selected based on a desired operatingvoltage of finFETs in high-voltage region 202. For example, inembodiments when the operating voltage of devices in high-voltage region202 is about 1.8V, thicknesses T2, T3, and T4 may be between about 30 Åto about 50 Å with a difference between a thickest point (e.g.,thickness T3 or T4) and a thinnest point (e.g., thickness T2) of gateoxide 150 may be less than about 7 Å. As another example, in embodimentswhere the operating voltage of devices in high-voltage region 202 isabout 1.5V, thicknesses T2, T3, and T4 may be between about 25 Å toabout 45 Å with a difference between a thickest point (e.g., thicknessT3 or T4) and a thinnest point (e.g., thickness T2) of gate oxide 150may be less than about 5 Å. Generally speaking, it has been observedthat lower operating voltage devices may require thinner and/or moreuniform gate oxides to achieve a same reliability as higher operatingvoltage devices.

In various embodiments, the thickness and/or conformity of gate oxide150 may be controlled by selecting a suitable thickness of nitride layer142 and/or controlling the process conditions of the oxidation process.For example, higher oxidation temperatures may provide for a moreconformal gate oxide layer. As another example, a thicker nitride layer142 may result in a more conformal gate oxide without increasing theprocessing temperature of the subsequent oxidation process. In suchembodiments, the lower-temperature oxidation process may advantageouslyreduce the risk of diffusion of dopants/semiconductor material fromsemiconductor substrate 102 and/or source/drain regions 134 intosurrounding device layers (e.g., STI regions 116, ILD 136, and thelike). For example, ISSG processes performed at a temperature less thanabout 950° C. may advantageously reduce the risk of diffusion fromsemiconductor substrate 102.

Because the operating voltage of devices in high-voltage region 202 andlow-voltage region 204 may differ, it may be desirable to form a thinnerand more uniform gate oxide in low-voltage region 204. FIGS. 14 through17C illustrate the formation of a thinner gate oxide 170 on channelregion 118 in low-voltage region 204. Referring first to FIGS. 14 and15, gate oxide 150 is removed from low-voltage region 204. The removalof gate oxide 150 from low-voltage region 204 may include a suitableetching process, such as, dry etching, wet etching, RIE, or the like. Ahard mask 148 may be formed over and protect gate oxide 150 inhigh-voltage region 202 during the etching of low-voltage region 204.After gate oxide 150 if removed from low-voltage region 204, hard mask148 may also be removed.

Next, as illustrated by FIG. 16, a nitride layer 152 is formed onexposed semiconductor surfaces of channel region 118 in low-voltageregion 204. The formation of nitride layer 152 may include asubstantially similar process as the formation of nitride layer 142 (seeFIGS. 12A through 12D). As discussed above, the nitridation process mayselectively form nitride layer 152 on exposed semiconductor surfaceswithout forming nitride layer 152 on other surfaces of wafer 100 (e.g.,gate oxide 150 and/or STI regions 116). In some embodiments, nitridelayer 152 may be thicker than nitride layer 142 to achieve increasedconformity in subsequently formed gate oxide 170 (see FIGS. 17A and17C).

In FIGS. 17A through 17C, an oxidation is performed to form a secondconformal gate oxide 170 on channel regions 118 in low-voltage region204. Gate oxide 170 may be formed using a similar oxidation process usedto form gate oxide 150. Thus, nitride layer 152 may be consumed duringthe oxidation, and in the resulting structure gate oxide 170 may includea semiconductor oxynitride layer over a semiconductor oxide layer (notexplicitly illustrated). In various embodiments, gate oxide 170 isthinner than gate oxide 150. Thus, the oxidation process for gate oxide170 may not affect the thickness of gate oxide 150 because the oxidationprocess may be completed before reaching the underlying semiconductormaterial of fins 108 in high-voltage region 202. In such embodiments,gate oxide 150 acts like a mask during the formation of gate oxide 170.

Furthermore, the resulting gate oxide 170 may have a thickness T5 on abottom edge of channel region 118, a thickness T6 on a sidewall ofchannel region 118, and a thickness T7 on a top surface of channelregion 118. As mentioned above, thicknesses T5, T6, and T7 may not beexactly equal due to the different crystalline orientations of thesemiconductor material of fins 108. For example, thickness T5 at abottom portion of channel regions 118 may be less than thicknesses T6and T7 on sidewalls and a top surface of channel regions 118. As furtherdiscussed above, gate oxide 170 may be thinner and more uniform thangate oxide 150 to achieve a desired reliability for the lower-operatingvoltage devices of low voltage region 204. For example, in embodimentswhen the operating voltage of devices in low-voltage region 204 is about0.9V, thicknesses T5, T6, and T7 may be between about 12 Å to about 10 Åwith a difference between a thickest point (e.g., thickness T6 or T7)and a thinnest point (e.g., thickness T5) of gate oxide 170 may be lessthan about 2 Å. As another example, in embodiments when the operatingvoltage of devices in low-voltage region 204 is about 0.75V, thicknessesT5, T6, and T7 may be between about 10 Å (or even less) with adifference between a thickest point (e.g., thickness T6 or T7) and athinnest point (e.g., thickness T5) of gate oxide 170 may be less thanabout 2 Å. Thus, gate oxides of varying thicknesses and uniformity maybe formed in different regions of a wafer depending on desired operatingvoltages of devices in such regions.

Next, referring to FIGS. 18A through 18B, remaining portions of gatestack 176 is formed in trenches 140 (e.g., between gate spacers 128).For example, a high-k dielectric liner 172 is formed as a conformallayer in trenches 140. High-k dielectric liner 172 may cover topsurfaces and the sidewalls of gate oxides 150 or 170 (see FIG. 17A). Inaccordance with some embodiments, high-k dielectric liner 172 includes ahigh-k dielectric material having k value greater than about 7.0, andmay include a metal oxide or a silicate of hafnium (Hf), aluminum (Al),zirconium (Zr), lanthanum (La), magnesium (Mg), barium (Ba), titanium(Ti), lead (Pb), combinations thereof, and the like. The formationmethods of high-k dielectric liner 172 may include molecular beamdeposition (MBD), ALD, plasma enhanced CVD (PECVD), or the like.

Next, a conductive gate electrode 174 is formed over high-k dielectricliner 172 by 174 remaining portions of trench 140 with a conductivematerial. Gate electrode 172 may include a metal-containing materialsuch as titanium nitride (TiN), tantalum nitride (TaN), tantalum carbon(TaC), cobalt (Co), ruthenium (Ru), aluminum (Al), combinations thereof,multi-layers thereof, and the like. The formation of high-k dielectricliner 172 and gate electrode 174 may overflow trench 140 and cover a topsurface of ILD 136. Subsequently, a planarization (e.g., a CMP) isperformed to remove the excess portions of high-k dielectric liner 172and gate electrode 174. The resulting remaining portions of gate oxide150 or 170, high-k dielectric liner 172, and gate electrode 174 forms agate stack 176 over a channel region 118 of the resulting finFET 180 inhigh-voltage region 202 and finFET 180 in low-voltage region 204.Additional features, such as source/drain contacts 178, for example,comprising nickel (Ni), tungsten (W), or the like may then be formed inILD 136 using any suitable process to electrically connect withsource/drain regions 134.

FIG. 19 illustrates an example process flow 300 for formingsemiconductor devices (e.g., finFETs) in accordance with someembodiments. In step 302, a semiconductor fin (e.g., fin 108) is formedextending upwards from a substrate (e.g., substrate 102). The finincludes a channel region (e.g., channel region 118) of a finFET (e.g.,finFETs 180 or 190). In step 304, a maximum thickness variation for agate oxide (e.g., gate oxide 150 or 170) is selected in accordance withan operating voltage of the finFET. For example, higher operatingvoltage finFETs may have a higher maximum thickness variation comparedto lower operating voltage finFETs. In some embodiments, the thicknessof the gate oxide may also be selected in accordance with the operatingvoltage of the finFET. In step 306, the gate oxide is formed on thechannel region. A thickness variation of the gate oxide (e.g., adifference in thicknesses between a thickest point and a thinnest pointof the gate oxide) may be less than the maximum thickness variationselected in step 304. Additional finFETs may also be formed, whereineach additional finFET's gate oxide variation and/or thickness may beselected based on a corresponding operating voltage. For example, ifanother finFET has a lower operating voltage, the gate oxide of theother finFET may be thinner and have a lower maximum thicknessvariation.

Various embodiments include forming conformal gate oxides over channelregions of finFETS. The operating voltage of finFETs in the die mayvary. For example, the die may include high-voltage regions (e.g., forinput/output finFETs) and low-voltage regions (e.g., core finFETs). Thethickness and uniformity of the gate oxides of each finFET may beselected in accordance with the finFET's operating voltage. Theformation of such gate oxides may include a surface nitridation processin combination with a suitable oxidation, which may improve theconformity of the gate oxides.

In accordance with an embodiment, a fin field-effect-transistor (finFET)includes a semiconductor fin comprising a channel region and a gateoxide on a sidewall and a top surface of the channel region. The gateoxide includes a thinnest portion having a first thickness and athickest portion having a second thickness different than the firstthickness. A difference between the first thickness and the secondthickness is less than a maximum thickness variation, and the maximumthickness variation is in accordance with an operating voltage of thefinFET.

In accordance with another embodiment, a semiconductor device includes afirst finFET having a first operating voltage and a second finFET havinga second operating voltage less than the first operating voltage. Thefirst finFET includes a first channel region and a first gate oxide onthe first channel region. The first gate oxide has a first thicknessvariation between a first thickest portion of the first gate oxide and afirst thinnest portion of the first gate oxide. The second finFETincludes a second channel region and a second gate oxide on the secondchannel region. The second gate oxide has a second thickness variationbetween a second thickest portion of the second gate oxide and a secondthinnest portion of the second gate oxide. The second thicknessvariation is less than the first thickness variation.

In accordance with yet another embodiment, a semiconductor deviceincludes a first fin field effect transistor (finFET) and a secondfinFET. The first finFET includes a first fin extending upwards from asemiconductor substrate, a first gate dielectric over and alongsidewalls of the first fin, and a first gate electrode over the firstgate dielectric. The first gate dielectric has a first averagethickness. The second finFET includes a second fin extending upwardsfrom the semiconductor substrate, a second gate dielectric over andalong sidewalls of the second fin, and a second gate electrode over thesecond gate dielectric. The second gate dielectric has a second averagethickness greater than the first average thickness, and a secondoperating voltage of the second finFET is greater than a first operatingvoltage of the first finFET.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1.-6. (canceled)
 7. A semiconductor device comprising: a first fin fieldeffect transistor (finFET) having a first operating voltage, the firstfinFET comprising: a first channel region; and a first gate oxide on thefirst channel region, wherein the first gate oxide has a first thicknessvariation between a first thickest portion of the first gate oxide and afirst thinnest portion of the first gate oxide; and a second finFEThaving a second operating voltage, wherein the second operating voltageis less than the first operating voltage, and wherein the second finFETcomprises: a second channel region; and a second gate oxide on thesecond channel region, wherein the second gate oxide has a secondthickness variation between a second thickest portion of the second gateoxide and a second thinnest portion of the second gate oxide, andwherein the second thickness variation is less than the first thicknessvariation.
 8. The semiconductor device of claim 7, wherein the firstgate oxide is thicker than the second gate oxide.
 9. The semiconductordevice of claim 7, wherein the first thickness variation is inaccordance with the first operating voltage, and wherein the secondthickness variation is in accordance with the second operating voltage.10. The semiconductor device of claim 7, wherein a first thickness ofthe first gate oxide is in accordance with the first operating voltage,and wherein a second thickness of the second gate oxide is in accordancewith the second operating voltage.
 11. The semiconductor device of claim7, wherein the first gate oxide comprises a semiconductor oxynitridelayer over a semiconductor oxide layer.
 12. The semiconductor device ofclaim 7, wherein the first thickness variation is less than about 7Angstroms (Å) when the first operating voltage is about 1.8 volts (V),and wherein the first thickness variation is less than about 5 Å whenthe first operating voltage is about 1.5 V.
 13. The semiconductor deviceof claim 7, wherein the second thickness variation is less than about 2Angstroms (Å), and wherein the second operating voltage is less thanabout 0.9 volts (V). 14.-20. (canceled)